JPS6433746U - - Google Patents
Info
- Publication number
- JPS6433746U JPS6433746U JP12808787U JP12808787U JPS6433746U JP S6433746 U JPS6433746 U JP S6433746U JP 12808787 U JP12808787 U JP 12808787U JP 12808787 U JP12808787 U JP 12808787U JP S6433746 U JPS6433746 U JP S6433746U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- positioning
- mechanism section
- section
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 10
- 230000032258 transport Effects 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12808787U JPS6433746U (en]) | 1987-08-25 | 1987-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12808787U JPS6433746U (en]) | 1987-08-25 | 1987-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433746U true JPS6433746U (en]) | 1989-03-02 |
Family
ID=31381097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12808787U Pending JPS6433746U (en]) | 1987-08-25 | 1987-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433746U (en]) |
-
1987
- 1987-08-25 JP JP12808787U patent/JPS6433746U/ja active Pending